发明名称 |
SYSTEM AND METHOD FOR PRODUCING DAMPING POLYURETHANE CMP PADS |
摘要 |
<p>A solid product formed by polymerizing a urethane prepolymer in the presence of a curative has a Bashore rebound that is less than about 38%. Preferably, the urethane prepolymer is an aliphatic isocyanate polyether prepolymer and the curative includes an aromatic diamine and a triol. To form a microcellular polyurethane material, the urethane prepolymer is frothed with inert gas, in the presence of a surfactant, then cured. The polyurethane can by employed to form highly damping CMP pads that have low rebound and can dissipate irregular energy and stabilize polishing to yield improved uniformity and less dishing.</p> |
申请公布号 |
WO2009029322(A1) |
申请公布日期 |
2009.03.05 |
申请号 |
WO2008US66565 |
申请日期 |
2008.06.11 |
申请人 |
PRAXAIR TECHNOLOGY, INC.;HUANG, DAVID PICHENG;ZHOU, MING;MOSER, TIMOTHY DALE |
发明人 |
HUANG, DAVID PICHENG;ZHOU, MING;MOSER, TIMOTHY DALE |
分类号 |
B24B37/04;B24D11/00;B24D13/14 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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