| 摘要 |
<p>PURPOSE:To improve luminescence efficiency by suppressing the dissolution of a boat material into a Ga solution by making almost all or part of a boat, where the Ga solution comes in contact, of Si3N4 at the time of the growth of a N-type growth layer. CONSTITUTION:Liquid-phase growth boat 10 is composed of main body 11 and slider 12 which is under the main body and slidable freely in the longish direction. To the top surface of main body 11, the 1st and 2nd openings 13 and 14 reaching the reverse surface are provided; one opening 13 is used to drop GaP substrate 17 into concavity 18 provided to slider 12, and the other opening 14 contains solution 23 for epitaxial growth. In the above constitution, main body 11 and slider 12 are formed of graphite and Si3N4 layers 20 to 22 are bonded to the inner circumference of opening 14 coming in contact with solution 23, part of the top surface of slider 12 exposed to the inner circumference, and the reverse surface of lid 19 inserted into opening 14. Fruther, gas supply material 15 with many through holes is also formed of Si3N4.</p> |
