| 摘要 |
<p>PURPOSE:To improve throughput by making a cassette storing box have openings on both sides of the front and the rear, and arranging respectively one transfer robot on either side. CONSTITUTION:Cassette storing boxes 1A have openings 2A and 2B on the front side and the rear side, respectively, and transfer robots 4A and 4B are so arranged as to be capable of shifting respectively along the front side and the rear side of each cassette storing box 1A. Accordingly, two transfer robots 4A and 4B on the front side and the rear side can do transfer work at the same time in parallel on the front side and the rear side of the cassette storing box 1A. Hereby, the throughput of the device can be improved.</p> |
