| 摘要 |
<p>PURPOSE:To realize a cathode which can obtain a large current value by forming several needle-shaped cathodes made of a polymer, whose curvature radius at its tip can be controlled freely, at desired positions on a cathode base body. CONSTITUTION:In the electronic apparatus with the function of a scanning electron microscope, cathode base body 8 is fitted to stage 7 in sample room 6 and a signal in a scanning-image observation mode is transmitted from control circuit 19 to power supplies 15 to 17. An electron beam from electron gun 2 scans on the surface of cathode base body 8 while forming a spot, so that the scanning image of cathode base body 8 will be obtained on cathode-ray tube 14. Over the observation of the image of the tip of cathode bose body 8, positions where several electron radiation parts should be formed are fixed and the voltage value of deflection power supply 17 equivalent to each position is stored in control circuit 19. Next, control circuit 19 is changed over to the carbon-polymer formation mode. After hydrocarbon is supplied with valve 11 opened, circuit 19 controls the electron beam to irradiate fixed positions on cathode base body 8 with the electron beam for a fixed time, thereby forming several electron radiation parts of a carbon polymer.</p> |
