发明名称 |
Method and apparatus for producing carbon coatings by sputtering |
摘要 |
A method for producing carbon coatings by sputtering comprises placing the target material to be sputtered which is made of a fibrous carbon material such as paper, velvet, wood, etc. which has been charred on the cathode. The apparatus comprises an electrode forming an anode which is arranged in spaced relationship to a cathode.
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申请公布号 |
US4173522(A) |
申请公布日期 |
1979.11.06 |
申请号 |
US19770831132 |
申请日期 |
1977.09.07 |
申请人 |
BALZERS PATENT-UND BETEILIGUNGS AG |
发明人 |
PULKER, HANS K;STAFFLER, REINHARD |
分类号 |
C23C14/06;C23C14/34;(IPC1-7):C23C15/00 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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