INSULATING FILM FORMING METHOD AND SUBSTRATE PROCESSING METHOD,申请号KR20077010211-传众专利搜索

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发明名称	INSULATING FILM FORMING METHOD AND SUBSTRATE PROCESSING METHOD
摘要
申请公布号	KR100939125(B1)	申请公布日期	2010.01.28
申请号	KR20077010211	申请日期	2005.11.02
申请人		发明人
分类号	H01L21/318;H01L21/324	主分类号	H01L21/318
代理机构		代理人
主权项
地址

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