DEVICE FOR HOLDING WAFER,申请号JP19780048703-传众专利搜索

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发明名称	DEVICE FOR HOLDING WAFER
摘要
申请公布号	JPS54141575(A)	申请公布日期	1979.11.02
申请号	JP19780048703	申请日期	1978.04.26
申请人	ULVAC CORP	发明人	TSUCHIYA KOUYOU;INOUE YOUJI
分类号	H01L21/677;H01L21/68	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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