| 摘要 |
PURPOSE:To make it possible to automatically interrupt the irradiation when a desired quantity of ion beams irradiated is reached, while sparing the man power, by automatically heating a sample to a desired temperature, while maintaining the vacuum higher than a preset level, and by irradiating the ion beams of a preset level. CONSTITUTION:The degree of vacuum in a vacuum container 2 is set at a level higher than a preset value. The container 2 is evacuated by an evacuator 14. If the degree of the vacuum is maintained at that level, an electric power is fed from a DC power souce 13 to a filament 1 so that the sample 3 is heated. In this instance, the temperature of the sample 3 is raised to a desired level by a vacuum presetting unit 11 and a temperature control unit 12. And, the sample 3 is irradiated with ion beams 17. During this irradiation, interchange is performed by a change-over switch 22 from the temperature controller 12 to a deflecting magnet control unit 23 so that the magnetic field of a deflecting magnet 18 is automatically controlled so that the temperature level indicated by a temperature recorder 8 may become constant. when a desired quantity of the ion beams irradiated is reached, an irradiation time setting unit 21 controls power source 20 to close a beam stopper 19 so that the ion beam irradiation is stopped. |
