发明名称 Magnetic correcting fence for adjacent e-guns
摘要 A plurality of electron gun assemblies having transverse magnetic fields to focus an electron beam into a crucible to vaporize a material may be closely placed in parallel by inserting between the assemblies a thin magnetic fence magnetized across its surfaces. The polarity of a fence surface is the same as the polarity of the adjacent sidewall magnet forming the transverse field so that the opposition will prevent magnetic flux from passing between adjacent assemblies and a resulting distortion and defocusing of the electron beam.
申请公布号 US4891821(A) 申请公布日期 1990.01.02
申请号 US19890329396 申请日期 1989.03.27
申请人 HANKS, CHARLES W. 发明人 HANKS, CHARLES W.
分类号 H01J37/06;C23C14/30;H01J37/153;H01J37/305 主分类号 H01J37/06
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