发明名称 CUTTING METHOD AND CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting method and a cutting device, capable of removing an abnormal shape part without increasing cost.SOLUTION: The cutting method is a cutting method of cutting a work W including an electrode by using a cutting blade. The cutting method includes: a cutting step of providing a work W with cutting water and cutting the work W by rotating the cutting blade; and an abnormal shape removal step of removing an abnormal shape part occurred in the cutting step by spraying a mixture K of a gas and fine particles to a part C to be cut that is cut with the cutting blade.SELECTED DRAWING: Figure 9
申请公布号 JP2016131189(A) 申请公布日期 2016.07.21
申请号 JP20150004299 申请日期 2015.01.13
申请人 DISCO ABRASIVE SYST LTD 发明人 MICHAEL WILLIAM GADD
分类号 H01L21/301;B24B27/06;B24C1/00;B24C11/00;B28D1/24;B28D5/00;B28D5/02 主分类号 H01L21/301
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