| 摘要 |
PROBLEM TO BE SOLVED: To provide a nickel based alloy sputtering target material capable of obtaining a strong leakage magnetic flux, low in permeability and high in use efficiency.SOLUTION: The nickel based sputtering target material consists of (Ni-Fe-Co)-Malloy, where M1 elements are one kind or two kinds or more of elements selected from W, Mo, Ta, Cr, V and Nb; the total amount W of the M1 elements is 2-20 at.% in terms of at.%; the remainder consists of Ni, Fe, Co and inevitable impurities; the items of Ni, Fe and Co contents are 20≤X≤98, 0≤Y≤50 and 0≤Z≤60; and in the micro structure, a matrix phase is a Ni-M phase, and an Fe phase and/or a Co phase are dispersed in the matrix phase.SELECTED DRAWING: None |
