发明名称 |
ADIABATIC MODE-PROFILE CONVERSION BY SELECTIVE OXIDATION FOR PHOTONIC INTEGRATED CIRCUIT |
摘要 |
Waveguide designs and fabrication methods provide adiabatic waveguide eigen mode conversion and can be applied to monolithic vertical integration of active and passive elements in PICs. An advantage of the designs and methods is a simple fabrication procedure with only a single etching step in combination with subsequent well-controllable selective oxidation. As a result, improved manufacturability and reliability can be achieved. |
申请公布号 |
EP2732320(B1) |
申请公布日期 |
2016.08.31 |
申请号 |
EP20120740804 |
申请日期 |
2012.07.13 |
申请人 |
INNOLUME GMBH |
发明人 |
GUBENKO, ALEXEY;KRESTNIKOV, IGOR;MIKHRIN, SERGEY;LIVSHITS, DANIIL;WOJCIK, GREG;KOVSH, ALEXEY |
分类号 |
G02B6/136;G02B6/12;G02B6/122;H01S5/10;H01S5/22 |
主分类号 |
G02B6/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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