BUBBLE GENERATING METHOD BY ELECTRIFICATION OF GAS AND APPLICATION THEREOF TO CLEANING

摘要

PROBLEM TO BE SOLVED: To provide a method of forming functional bubbles having kinetic energy exerting attractive force by passing a gas through a strong negative or positive magnetic field to charge the gas with static electricity and causing the charged gas to generate bubbles forming a homopolar repulsive magnetic field, and a method of applying the bubbles to various cleaning.SOLUTION: A cleaning method includes: forming a fluid cleaning liquid by negatively electrostatically charging a hydrogen gas in ultrapure water; spraying the mixture droplets onto a silicon wafer at high rate to negatively electrostatically charge fine foreign substances on the silicon wafer, which facilitates reduction cleaning by virtue of the homopolar repulsive action. The bubbles also function for bubble shot blasting and thus exert double functions of cleaning blast and bubble blast since the bubbles gather at the center under the own centrifugal force although the bubbles have random diameters in a microbubble generator using the hydrogen gas.SELECTED DRAWING: Figure 1