发明名称 |
VAPOR DEPOSITION DEVICE, VAPOR DEPOSITION METHOD, AND METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENCE DISPLAY DEVICE |
摘要 |
A vapor deposition device (50) disclosed, a partition wall (26) standing between film formation regions on a film formation substrate (200), includes: a mask unit (80) including a shadow mask (81) and a vapor deposition source (85) fixed in position relative to each other; contacting means for bringing the film formation substrate (200) and the shadow mask (81) into contact with each other at the partition wall (26); and moving means for moving at least a first one of the mask unit (80) and the film formation substrate (200) relative to a second one thereof in a state in which the contact caused by the contacting means is kept. |
申请公布号 |
US2016260902(A1) |
申请公布日期 |
2016.09.08 |
申请号 |
US201615094902 |
申请日期 |
2016.04.08 |
申请人 |
Sharp Kabushiki Kaisha |
发明人 |
SONODA Tohru;KAWATO Shinichi;INOUE Satoshi |
分类号 |
H01L51/00;H01L27/32;C23C14/50;H01L51/56;C23C14/04;C23C14/24 |
主分类号 |
H01L51/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
Osaka JP |