METHOD OF MANUFACTURING ELECTRON MULTIPLIER BODY, PHOTOMULTIPLIER TUBE, AND PHOTOMULTIPLIER

摘要

A method of manufacturing an electron multiplier body, the method includes a step of preparing a first plate-like member having a surface and a back surface and a pair of second plate-like members, a step of forming, in the first plate-like member, a hole portion reaching from the front surface to the back surface, a step of constituting a laminated body by laminating the first and second plate-like members on each other so that the first plate-like member is interposed between the pair of second plate-like members to form a channel defined by the hole portion in the laminated body, a step of integrating the laminated body, a step of constituting a main body portion by cutting the integrated laminated body so that the channel is open, and a step of forming a resistive layer and a secondary electron multiplication layer on an inner surface of the channel.

主权项

1. A method of manufacturing an electron multiplier body including a main body portion extending in a first direction, and a channel opened at one end surface and the other end surface of the main body portion in the first direction and emits secondary electrons according to incident electrons, the method comprising:
a preparing step of preparing a first plate-like member having a front surface and a back surface opposite to the front surface, and a pair of second plate-like members; a hole forming step of forming, in the first plate-like member, a hole portion reaching from the front surface to the back surface and extending along the front surface and the back surface; a laminating step of constituting a laminated body by laminating the first and second plate-like members on each other so that the first plate-like member is interposed between the pair of second plate-like members to form the channel defined by the hole portion in the laminated body; an integrating step of integrating the laminated body; a cutting step of constituting the main body portion by cutting the integrated laminated body; and a layer forming step of forming a resistive layer and a secondary electron multiplication layer on an inner surface of the channel, wherein in the cutting step, the laminated body is cut so that the channel is open at the one end surface and the other end surface.