NITRIDE SEMICONDUCTOR CRYSTAL PRODUCING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a nitride semiconductor crystal producing method capable of suppressing the occurrence of cracking in the nitride semiconductor crystal and thereby ensuring the enhancement of the nitride semiconductor crystal yield, and a nitride semiconductor epitaxial wafer and a nitride semiconductor freestanding substrate.SOLUTION: A nitride semiconductor crystal producing method includes growing a nitride semiconductor crystal over a seed crystal substrate, while applying etching to an outer end of the seed crystal substrate during the growing of the nitride semiconductor crystal.SELECTED DRAWING: Figure 3