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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS54134980(A)
申请公布日期
1979.10.19
申请号
JP19780043042
申请日期
1978.04.12
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
YANASE TOSHINOBU
分类号
H01L21/306;H01L21/302
主分类号
H01L21/306
代理机构
代理人
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地址
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