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发明名称
PRODUCTION OF SILICON NITRIDE
摘要
申请公布号
JPS54134099(A)
申请公布日期
1979.10.18
申请号
JP19780041712
申请日期
1978.04.11
申请人
ASAHI GLASS CO LTD
发明人
SATOU KIMIHIKO;TERASE KUNIHIKO;HISHIMUDA HITOSHI
分类号
C01B21/068;C01B21/06
主分类号
C01B21/068
代理机构
代理人
主权项
地址
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