GASEOUS PLASMA ETCHING OF ALUMINIUM AND ALUMINIUM OXIDE,申请号GB19770024546-传众专利搜索

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发明名称	GASEOUS PLASMA ETCHING OF ALUMINIUM AND ALUMINIUM OXIDE
摘要
申请公布号	GB1554335(A)	申请公布日期	1979.10.17
申请号	GB19770024546	申请日期	1977.06.13
申请人	NORTHERN TELECOM LTD	发明人
分类号	C23F4/00;H01L21/302;H01L21/3065;H01L21/311;H01L21/3213;(IPC1-7):C23F1/00	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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