| 摘要 |
PURPOSE:To obtain an oscillator which is steady and features high Q value by securing the positive propagation of the support arm oscillation of the vertical oscillator to the support stage and also constituting the support stage movable in order to prevent dispersion of the oscillation enrgy. CONSTITUTION:The vertical oscillator is formed via the photoetching process, etc. from the piezoelectric crystal plate and in a body with oscillation part 5 plus support arm 6 and 6', and then fixed by adhesion to arm part 11 and 11' of the U-shaped stage. This stage is adhered firmly to substrate 12 at the basement 12. In this case, the length and width of arm 11 and 11' are set properly according to the materials, and thus each arm can feature the bend or length vertical oscillation in the same oscillation number as the natural frequency of the oscillator. As a result, the enclosue of energy becomes possible, obtaining the steady and high Q value. Furthermore, the stage features U-shape and the two arms are linked each other at the basement, thus once fixture sufficing for the stage to the substrate to be thus suited to the mass production. |
