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发明名称
FORMING METHOD FOR DIELECTRIC LAYER OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS54131872(A)
申请公布日期
1979.10.13
申请号
JP19780039439
申请日期
1978.04.04
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
YOKOGAWA SHIYUNJI
分类号
H01L21/56;H01L21/312
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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