摘要 |
A diaphragm (5) to serve as a movable part of a valve, in particular a quantity-apportioning and metering valve of a fuel injection system for internal combustion engines comprises a clamping region (44), at least one resilient region (43) and at least one control region (42) for co- operating with a valve seat. The control region (42) has a thickness greater than that of the resilient region (43), and the clamping region (44) is provided with a photovarnish layer (47) which is resistant to the medium flowing through and which serves as seal and corrosion protection between diaphragm and valve housing. In a process for the manufacture of the diaphragm, outline, openings and different profile thicknesses of the diaphragm are produced consecutively or simultaneously by photochemical etching from a uniformly thick semiproduct having a layer of photovarnish on both major faces thereof. <IMAGE> |