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经营范围
发明名称
MONITORING POTENTIAL DISTRIBUTION ON A SURFACE
摘要
申请公布号
GB2017940(A)
申请公布日期
1979.10.10
申请号
GB19790011289
申请日期
1979.03.30
申请人
SIEMENS AG
发明人
分类号
G01R31/26;G01R13/00;G01R19/00;G01R29/14;G01R31/302;G01R31/305;H01J37/28;H01L21/66;(IPC1-7):H01J37/28
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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