Top-entry transmission electron microscope

摘要

A top-entry transmission electron microscope comprises a stage with a changeable cartridge which houses a specimen holder spaced in the magnetic lens field and tiltable about the axis x perpendicular to the microscope optical axis. An executive step motor of the specimen holder's electric drive is mounted on the stage and has a rotor mechanically coupled with the specimen holder for the rotor and holder to be turned synchronously. The microscope comprises also a rocker pivotally mounted in the changeable cartridge and designed to convey the drive to the rotor via a drive transmitting member; a rotor-turning piezoelectrically actuated electro-mechanical means and a rocker-positioning piezoelectrically actuated electromechanical means which are connected, respectively, to a control voltage shaper of the step motor and to a unit for settling the magnitude and sence of specimen holder displacement. The disclosed microscope features a lower level of drift of the tiltable specimen holder, widened up to 360 DEG range of specimen tilt angles, and a greater speed of obtaining stereopair micrograpgs.