发明名称 |
Near-surface thermal gradient enhancement with opaque coatings |
摘要 |
A thin opaque layer of material is deposited on one or both major opposed surfaces of a semiconductor wafer to enhance establishing a thermal gradient near the major surface or surfaces to produce straight, fine molten wires (<0.002'') of a metal by migration of a melt of the metal through a solid, or matrix, both of semiconductor material by thermal gradient zone melting processing along a thermal gradient established and maintained aligned substantially parallel with a preferred crystal axis of migration by thermal gradient zone melting processing.
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申请公布号 |
US4170491(A) |
申请公布日期 |
1979.10.09 |
申请号 |
US19780967280 |
申请日期 |
1978.12.07 |
申请人 |
GENERAL ELECTRIC |
发明人 |
ANTHONY, THOMAS R;CLINE, HARVEY E;HOUSTON, DOUGLAS E |
分类号 |
H01L21/24;(IPC1-7):H01L21/22 |
主分类号 |
H01L21/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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