| 摘要 |
PURPOSE:To nitride and sulfurize a product surface at the same time by ion engineering treatment, by introducing a mixed gas consisting of one or more out of H2, Ar and He, N2 and H2S into a vacuum and applying a DC voltage between the product as a cathode and an anode to produce glow discharge. CONSTITUTION:A mixed gas consisting of N2; 10-90 V%, H2S; 0.01 - 5 V% and the balance one or more out of H2, Ar and He is introduced into a vacuum below 0.1 Torr to regulate the vacuum degree to 1-5 Torr. In this vacuum chamber, a DC voltage is applied to a product to be treated as a cathode and an anode to produce glow discharge at 400-600 deg.C, thereby subjecting the product surface to ion sulfurizing and ion nitriding. Thus, a 3-50 mu thick sulfurized, nitrided layer is formed. The thickness is suitable for providing wear resistance and self-lubricity to the product surface. |
