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发明名称
METHOD AND APPARATUS FOR INTERFERENCE FRINGE CENTER SENSING
摘要
申请公布号
US4169980(A)
申请公布日期
1979.10.02
申请号
US19780898832
申请日期
1978.04.21
申请人
ZYGO CORP
发明人
ZANONI, CARL A
分类号
G01B11/02;G01J9/02;(IPC1-7):G02B27/38
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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