| 摘要 |
<p>PURPOSE:To prevent defects from occurring by detecting change of a laser reflection light quantity dependent upon slippage in scribing. CONSTITUTION:Detecting laser head 4 is provided near scribing laser head 3 to send reflection light 8 to detector circuit 6. Circuit 6 compares the reflection light qauntity and a set value with each other, and drives automatic stopping circuit 7 by signal 9 if the reflection light quantity is outside a rated value. Thus, defects are prevented from occurring.</p> |
