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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS54125968(A)
申请公布日期
1979.09.29
申请号
JP19780033738
申请日期
1978.03.23
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMAMOTO TAKESHI
分类号
H01L21/3205;H01L21/28;H01L21/283
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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