发明名称 SUPPORT DEVICE FOR USE IN A CRUCIBLE-FREE FLOATING ZONE MELTING APPARATUS
摘要 <p>TITLE "A SUPPORT DEVICE FOR USE IN A CRUCIBLE-FREE FLOATING ZONE MELTING APPARATUS" In an apparatus for crucible-free zone melting, a device for supporting a lower end of the crystalline rod of semiconductor which has a junction with a seed crystal characterized by the support device being formed by a plurality of sections or parts which are moveable relative to each other from a first position spaced or retracted from the seed crystal and the lower end of the rod to enable melting the rod adjacent to the junction and a second position forming a container surrounding the seed crystal and the lower end of the rod for receiving a supporting or stabilizing medium which dampens or prevents vibrations from being applied to the lower end of the rod and the junction. The sections are held in the second position by a holding means which may either be electromagnetic or mechanical.</p>
申请公布号 CA1062997(A) 申请公布日期 1979.09.25
申请号 CA19750240148 申请日期 1975.11.20
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 BAROWSKI, GERHARD;KELLER, WOLFGANG;SCHROETTER, GERHARD
分类号 C30B13/00;C30B13/28;C30B13/32;H01L21/208;(IPC1-7):01J17/10 主分类号 C30B13/00
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