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经营范围
发明名称
Etching technique for fabricating semiconductor or ceramic devices
摘要
申请公布号
US3122463(A)
申请公布日期
1964.02.25
申请号
US19610094056
申请日期
1961.03.07
申请人
BELL TELEPHONE LABORATORIES, INCORPORATED
发明人
LIGENZA JOSEPH R.;SHAPIRO HERBERT M.
分类号
H01L21/3065;H01L21/311
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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