| 摘要 |
PURPOSE:To restrain the short-circuit to other electrodes and floating capacity increment to a minimum by removing an insulating film after opening a window in the insulating film to connect a wire to the exposed metallic film. CONSTITUTION:SiO2 film 14 is laminated on Si3N4 film 4 on GaAs substrate 3, and a window is selectively opened on electrode 5 to bond wire 6. After that, when film 14 is removed overall, wire 6 is prevented from contacting with insulating film 4 around electrode 5, and the generation of a floating capacity can be restrained to a minimum. |
