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发明名称
SCANNING ELECTRONIC MICROSCOPE
摘要
申请公布号
JPS54114174(A)
申请公布日期
1979.09.06
申请号
JP19780021740
申请日期
1978.02.27
申请人
NIPPON ELECTRON OPTICS LAB
发明人
HIRATA YOSHIHIRO
分类号
H01J37/28
主分类号
H01J37/28
代理机构
代理人
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