Apparatus for marking identification symbols on wafer

摘要

An apparatus for marking identification symbols on a wafer including: a marking means for marking identification symbols on the wafer; a reading means for reading the marked identification symbols; a comparing means for comparing data of the identification symbols which are read by the reading means with basic data on which the identification symbols are marked on the wafer, and a judging means for inspecting and judging from a result of the comparison whether the desired identification symbols are marked on the wafer or not.