发明名称 OPTICAL DEVICE
摘要 <p>PURPOSE:To transmit a stable moving force by making a non-metallic cushioning substance intervene in an operation system including a driving source. CONSTITUTION:A main gear 10 is inserted in a boss 35 provided on the leading edge of a driving shaft 8 and the non-metallic cushioning substance, that is, a felt 33a, is provided on the contact part with coil springs 37 which hold the main gear 10 between them. Therefore, in the main gear 10 which transmits a rotating force to a cylindrical mechanism part, a part where it touches with metal becomes smaller and the occurrence of dust can be reduced, then the stable moving force can be transmitted.</p>
申请公布号 JPH0228545(A) 申请公布日期 1990.01.30
申请号 JP19880178727 申请日期 1988.07.18
申请人 TOKYO ELECTRON LTD 发明人 YAMASAKA CHIKAHITO
分类号 G01B11/24;G01N21/88;G01N21/956;G01R31/26;H01L21/027;H01L21/30;H01L21/66;H01L21/68 主分类号 G01B11/24
代理机构 代理人
主权项
地址