Method and apparatus for the elemental analysis of solids

摘要

{PG,1 A method has been devised whereby material is removed from a solid surface and ionized to produce singly charged monatomic ions representative of the surface. A sample of the material (or surface) is mounted in place of the repeller electrode of an ion source, biased negatively with respect to the source{3 s block and sputtered with argon ions. Some of the sputtered sample material is ionized by charge exchange with the argon ions near the ion source{3 s exit slit and accelerated into a mass analyzer. An electron beam is used to ionize the argon sputtering gas. This method provides an advantage in that the initial kinetic energy spread of the monatomic ions is much lower than with other methods.