发明名称 |
APPARATUS FOR DOPING A SEMICONDUCTOR CRYSTALLINE ROD |
摘要 |
<p>A device is described for the deliberate introduction of doping material radiogenically into a semiconductor crystalline rod, in which a connection to a radiation source is provided in an irradiation chamber with a rod holder arranged therein. The doping of the semiconductor rod is effected via controlled axial movements of the rod in relation to the radiation source.</p> |
申请公布号 |
CA1061686(A) |
申请公布日期 |
1979.09.04 |
申请号 |
CA19750233057 |
申请日期 |
1975.08.07 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
MARTIN, JOACHIM;HAAS, ERNST;SCHNOELLER, MANFRED |
分类号 |
C30B31/20;G21G1/06;G21K1/00;G21K5/08;H01L21/261;(IPC1-7):01J17/34 |
主分类号 |
C30B31/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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