| 摘要 |
PURPOSE:To make it possible to mass-produce miniature vibrators of high precision by improving characteristics of a single crystal body by sticking a piezoelectric coating oxidized to the surface of a crystal plate. CONSTITUTION:Crystal plate 1 is turned by (alpha) on axis Y with axis Z taken as a normal line, and piezoelectric thin film 1 of zinc oxide is stuck to the surface of the crystal plate by RF sputtering. Here, vibrator 2 is made of plate 1 by photoetching and the piezoelectric thin film of zinc oxide is used, so that temperature characteristics of a crystal unit body can be improvied. Consequently, miniature vibrators can be mass-produced with high precision. |
