| 摘要 |
PURPOSE:To minimize the error of micro-movement caused by thermal deformation by separating in far distance from the driving source which is heating material. CONSTITUTION:Table 1 stops at the position where magnetic repulsion between No.1 permanent magnet 14b and No.2 permanent magnet 14a, and magnetic repulsion between No.4 permanent magnet 15b are balanced. Then, when the magnetic charges of No.1, No.2 premanent magnets 14b, 14a are allowed to be larger than the magnet charges of No.3 and No.4 permanent magnets 15a, 15b, the movement of table 1 becomes high precision micro-movement which is smaller than the movement of No.4 permanent magnet 15b. When No.4 permanent magnet 15b is moved a certain amount by actuating the driving motor of magnet feeding configuration 16, the table is micro-moved to the position where the magnetic repulsion is balanced. |
