Vacuum coating appts. esp. for high speed steel or hard metal tools - has coating source material coaxially beneath hollow carrier for tools

摘要

Thevacuum chamber has a source (a) of accelerated ions of the coating material (a), located coaxially below a hollow cool carrier (b) consisting of an inverted cup held at a negative potential and electrically connected to the substrates, which are suspended in the cup; and a reactive gas is fed into the chamber. The tools are e.g. drills or boring tools. The source and carrier cup are pref. sepd. by a ring nozzle supplying the reactive gas into the plasma stream flowing between source and cup. The side wall of the cup (b) is pref. hollow and used as a ring nozzle to feed reactive gas into the cup. Used in the mass prodn. of tools etc. which have a coating of complex but unspecified compsn.