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发明名称
Improvements relating to apparatus for use with vacuum chambers
摘要
申请公布号
GB2014500(A)
申请公布日期
1979.08.30
申请号
GB19790006960
申请日期
1979.02.27
申请人
DOBSON C D
发明人
分类号
H01L21/687;(IPC1-7):H01J37/20
主分类号
H01L21/687
代理机构
代理人
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地址
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