| 摘要 |
<p>PURPOSE:To analyze the fine structure or composition in a test piece by irradiating the test piece with a bundle of transmissive light having a preset diameter the scattered light in the test piece is used as optical information while using the direction intersecting the optical axis of the bundle as an observatory optical axis. CONSTITUTION:The beam coming from a light souce 1 has its optical path determined by a mirror 3 as well as the polarizing direction, if necessary, so that it si converged thin to enter a test piece 7 by the action of an optical system 4. The beam is scattered in the cource passing through the test piece, and the scattered light is observed by an observatory optical system 8 so that information concerning the fine structure or composition in the test piece 7 can be obtained. If, moreover, the mirror 4 and the optical system 4 are held so that the beam is scanned in the horizontal direction by means of a carriage 2 which is movable in the direction of arrow A, the information of the section in the test piece 7 can be obtained as an image. Like functions can be obtained by moving the carriage 6 in the direction of arrow B in place of the beam scanning operation.</p> |
