发明名称 METHOD OF FABRICATING SEMICONDUCTOR
摘要 Process of manufacturing semiconductor devices by providing on the surface of a substrate of one conductivity at first only a covering with a doping agent of the other conductivity and then, after the building of mesas, the PN-junction is formed by diffusion in an oxidizing atmosphere whereby simultaneously a protecting SiO2 layer is formed on the free surface of the mesa.
申请公布号 JPS54109779(A) 申请公布日期 1979.08.28
申请号 JP19780152610 申请日期 1978.12.09
申请人 发明人
分类号 H01L21/225;H01L21/316;H01L21/329;H01L21/56;H01L29/861 主分类号 H01L21/225
代理机构 代理人
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