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发明名称
METHOD AND DEVICE FOR PLASMA ETCHING
摘要
申请公布号
JPS54108579(A)
申请公布日期
1979.08.25
申请号
JP19780015771
申请日期
1978.02.14
申请人
FUJITSU LTD
发明人
KUDOU DAIJIROU;IIDA KAZUO
分类号
B01J3/00;H01L21/302;H01L21/3065
主分类号
B01J3/00
代理机构
代理人
主权项
地址
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