| 摘要 |
PURPOSE:To reduce time for deposition and to prevent explosion of molten silicon balls in vacuum deposition, by use of a vessel made of carbonaceous material as the vessel for silicon vacuum deposition by electron beam evaporation method. CONSTITUTION:Silicon 8 is placed on a vessel 12 made of carbonaceous material or graphite, or alumina mixed with not less than 50 % carbonaceous material powder, and is struck with electron beam 5 to effect silicon evaporation. |
