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发明名称
MANUFACTURE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS54107676(A)
申请公布日期
1979.08.23
申请号
JP19780014731
申请日期
1978.02.10
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YOSHINO MASARU
分类号
H01L21/306;H01L21/302
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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