发明名称 METHOD OF FABRICATING SEMICONDUCTOR
摘要 A method of manufacture of a zener diode with a given breakdown voltage is disclosed wherein the resistivity of the initial wafer is measured before diffusion of a junction in the wafer, and a diffusion operation is then performed to diffuse the junction at a fixed diffusion temperature and for a time which is determined such that the desired breakdown voltage is proportional to the product of the square root of the initial resistivity and the fourth root of the diffusion time.
申请公布号 JPS54107275(A) 申请公布日期 1979.08.22
申请号 JP19780150947 申请日期 1978.12.05
申请人 INT RECTIFIER CORP 发明人 URAJIMIIRU RODOFU
分类号 H01L21/22;H01L21/223;H01L29/866 主分类号 H01L21/22
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