| 摘要 |
PURPOSE:To improve ion nitriding work in a vacuum reactor with glow discharge by using a circuit for detecting arc discharge, a circuit for temporarily stopping glow discharge and a circuit for automatically controlling a vacuum to prevent generation of continuous arc discharge. CONSTITUTION:Vacuum reactor 2 is evacuated to a vacuum degree of 1-10 Torr with exhaust system 6, and a treating gas is supplied. DC voltage is applied between the inner wall of reactor 2 as an anode and cathode stand 8, that is, product to be treated as a cathode from power source unit 4 for glow discharge to generate glow discharge, whereby reactor 2 is heated to a temp. at which nitriding can be carried out, and product 5 is nitrided. Once arc discharge is generated, unit 4 is stopped for a set time according to the timer of control circuit 16 interlocked to an arc discharge detector. Vacuum valve 6' is opened to raise the vacuum degree of reactor 2 to 8-13 Torr, and glow discharge is generated again to allow the reactor to automatically return to normal operation. Thus, generation of arc discharge is automatically prevented, and a complex construction is uniformly nitrided. |
