| 摘要 |
PURPOSE:To perform an efficient cleaning by providing a mechanism for moving an exposure mask up and down and a mechanism for rotating the exposure mask about the axis of rotation, CONSTITUTION:An exposure mask 1 is retained in a vertical position by a pair of holders 2a which hold the opposite corners thereof A rotary mechanism B moves retaining arms 2 horizontally and vertically parallel to each other and rotates the exposure mask 1 about the axis of rotation vertical thereto. A lifting mechanism A moves the rotary mechanism B up and down to thereby move the exposure mask 1 up and down, whereby the dusts which come out of a brush and are attached to the edge of chrome pattern can be showered off with its position changed. |
