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发明名称
摘要
申请公布号
JPS5423229(B1)
申请公布日期
1979.08.11
申请号
JP19750026359
申请日期
1975.03.03
申请人
发明人
分类号
H01L29/78;H01L21/768;H01L23/522;H01L27/04;H01L29/76;(IPC1-7):H01L27/04
主分类号
H01L29/78
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代理人
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